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Linear Stages: >10 μm Accuracy

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Below is a selection of direct drive and linear motor products with an accuracy more than 10 micrometers. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.

Miniature Linear Motor Stage – MMX & MMG

MMS™

The MMS™ – Miniature Long Travel Linear Stage ideal for imaging applications where a long travel load/unload axis is required.

Travel200 - 400 mm
Accuracy< 15 μm
Repeatability0.6 μm
Payload12 kg
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XY POSITIONING STAGE – XYR

XYR™

The XYR™ series XY positioning stage is our most popular XY linear stage and uses a lead screw for motion. The monolithic integrated XY center makes the stage stiff and compact.

Travel50 - 300 mm
Accuracy15 μm
Repeatability< ± 3 μm
Payload175 kg
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XY Motorized Linear Stage – XYA

XYA™

The XYA™ series XY linear stage has the motors and controller embedded within the stage structure for a cleaner appearance and less external cabling.

Travel100 - 200 mm
Accuracy50 μm TIR
Repeatability< ± 5 μm
Payload10 kg
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High Capacity Linear Translation Stage – XYL

XYL™

The XYL™ series has the largest table size, longer travels, and larger bearings for a stiffer platform that can handle larger payloads.

Travel300 - 685 mm
Accuracy35 μm TIR
Repeatability< ± 3 μm
Payload175 kg
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INVERTED MICROSCOPE XY STAGE – OFS

OFS™

The OFS™ series inverted microscope XY stage of open frame XY tables combines low-profile, two-axis positioning with an open aperture. 

Travel50 - 200 mm
Accuracy15 μm TIR
Repeatability< ± 2.5 μm
Payload2 kg
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MOTORIZED XY STAGE – OFL

OFL™

The OFL™ series motorized XY stage provides increased travel and load bearing capacity in an open frame XY configuration. 

Travel200 - 635 mm
Accuracy80 μm TIR
Repeatability< ± 3 μm
Payload80 kg
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MICROSCOPE STAGE – XYMR

XYMR™

The XYMR™ series microscope stage brings automated, highly accurate XY positioning to a wide range of microscope-based applications. 

Travel150 mm
Accuracy30 μm TIR
Repeatability< ± 1.5 μm
Payload10 kg
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MICRO LINEAR STAGE – KV

KV™

The KV™ micro linear stage is a lead-screw-driven step motor stage with a miniature size.

Travel25 - 200 mm
Accuracy15 μm TIR
Repeatability< ± 3 μm
Payload15 kg
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Z STAGE – ZE

ZE™

Our elevator wedge Z stage provides a small footprint with a 200-millimeter-square moving table.

Travel12 - 38 mm
Accuracy15 μm TIR
Repeatability< ± 1.5 μm
Payload10 kg
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LINEAR MOTION SLIDE – LM

LM™

The LM™ series linear motion slide is a low-cost, single axis stage with crossed roller ways and stepper motor.

Travel50 - 300 mm
Accuracy15 μm TIR
Repeatability< ± 1.5 μm
Payload175 kg
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