Linear Stages: <10 μm Accuracy
Below is a selection of direct drive and linear motor products with an accuracy less than 10 micrometers. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.
SmartStage™ XY
The SmartStage Linear Positioner offers high performance and includes an innovative built-in controller right inside the stage.
| Travel | 50 - 200 mm |
|---|---|
| Accuracy | < 16 μm |
| Repeatability | 0.8 μm |
| Payload | 10 kg |
DOF™
The DOF series Dover Objective Focuser stage has been optimized for optical microscopy applications.
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| Travel | 5 mm |
|---|---|
| Resolution | 1.25 nm |
| Repeatability | < 50 nm |
| Bandwidth | > 225 Hz |
MMX™ & MMG™
The MMX™ & MMG™ series miniature linear stage has a low profile design with high power linear servo motor options.
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| Travel | 25 - 150 mm |
|---|---|
| Accuracy | < ± 3 μm |
| Repeatability | < ± 0.4 μm |
| Payload | 10 kg |
MAG™
The MAG™ series servo linear actuator utilizes a moving magnet design and linear servo motor.
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| Travel | 50 - 250 mm |
|---|---|
| Accuracy | 3 μm TIR |
| Repeatability | < ± 0.5 μm |
| Payload | 75 kg |
AG™
The Airglide™ air bearing stage design uses precision stiff air bearings for large payloads.
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| Travel | 150 - 400 mm |
|---|---|
| Accuracy | 4 μm TIR |
| Repeatability | < ± 0.4 μm |
| Payload | 40 kg |
FB™
FiberBeam™ linear air bearing positioners are designed for high accuracy in a low profile.
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| Travel | 20 - 100 mm |
|---|---|
| Accuracy | 2 μm TIR |
| Repeatability | < ± 0.1 μm |
| Payload | 15 kg |
XYRB™
The XYRB™ series precision XY stage is similar to the XYR™, but incorporates a ball screw for more precise and repeatable positioning. The encoder option improves accuracy.
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| Travel | 50 - 300 mm |
|---|---|
| Accuracy | 8 μm TIR |
| Repeatability | < ± 1 μm |
| Payload | 175 kg |
DDM™
The DDM™ series direct drive motorized microscope stage provides quiet motion with the best accuracy and repeatability of the open frame series.
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| Travel | 120 x 80 mm |
|---|---|
| Accuracy | 2 μm TIR |
| Repeatability | < ± 0.25 μm |
| Payload | 1 kg |
FM™
The FM™ series is a ball screw linear stage with a stiffer table and larger crossed roller bearings.
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| Travel | 100 - 350 mm |
|---|---|
| Accuracy | 5 μm TIR |
| Repeatability | < ± 1.5 μm |
| Payload | 115 kg |
LMB™
The LMB™ series ball screw linear actuator is a high-precision, single-axis stage with crossed roller bearings.
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| Travel | 50 - 300 mm |
|---|---|
| Accuracy | 8 μm TIR |
| Repeatability | < ± 0.5 μm |
| Payload | 175 kg |
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