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Linear Stages: <10 μm Accuracy

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Below is a selection of direct drive and linear motor products with an accuracy less than 10 micrometers. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.

DOF series Dover Objective Focuser stage

DOF™

The DOF series Dover Objective Focuser stage has been optimized for optical microscopy applications.

Travel5 mm
Resolution1.25 nm
Repeatability< 50 nm
Bandwidth> 225 Hz
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Miniature Linear Motor Stage – MMX & MMG

MMX™ & MMG™

The MMX™ & MMG™ series miniature linear stage has a low profile design with high power linear servo motor options.

Travel25 - 150 mm
Accuracy< ± 3 μm
Repeatability< ± 0.4 μm
Payload10 kg
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Servo Linear Motor Actuator - MAG

MAG™

The MAG™ series servo linear actuator utilizes a moving magnet design and linear servo motor.  

Travel25 - 250 mm
Accuracy3 μm TIR
Repeatability< ± 0.5 μm
Payload75 kg
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Air Bearing Linear Stage – AIRGLIDE

AG™

The Airglide™ air bearing stage design uses precision stiff air bearings for large payloads. 

Travel150 - 400 mm
Accuracy4 μm TIR
Repeatability< ± 0.4 μm
Payload40 kg
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Low Profile Linear Bearing Stage – FIBERBEAM

FB™

FiberBeam™ linear air bearing positioners are designed for high accuracy in a low profile.  

Travel20 - 100 mm
Accuracy2 μm TIR
Repeatability< ± 0.1 μm
Payload15 kg
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PRECISION XY TABLE – XYRB

XYRB™

The XYRB™ series precision XY stage is similar to the XYR™, but incorporates a ball screw for more precise and repeatable positioning. The encoder option improves accuracy.

Travel50 - 300 mm
Accuracy8 μm TIR
Repeatability< ± 1 μm
Payload175 kg
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DIRECT DRIVE MOTORIZED MICROSCOPE STAGE – DDM

DDM™

The DDM™ series direct drive motorized microscope stage provides quiet motion with the best accuracy and repeatability of the open frame series.  

Travel120 x 80 mm
Accuracy2 μm TIR
Repeatability< ± 0.25 μm
Payload1 kg
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BALL SCREW LINEAR STAGE – FM

FM™

The FM™ series is a ball screw linear stage with a stiffer table and larger crossed roller bearings.

Travel100 - 300 mm
Accuracy5 μm TIR
Repeatability< ± 1.5 μm
Payload115 kg
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BALL SCREW LINEAR ACTUATOR – LMB

LMB™

The LMB™ series ball screw linear actuator is a high-precision, single-axis stage with crossed roller bearings.

Travel50 - 250 mm
Accuracy8 μm TIR
Repeatability< ± 0.5 μm
Payload175 kg
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XYZ Overhead – SAX

SAX

The Dover SAX gantry stage is a versatile split-axis XY gantry system utilizing high-efficiency, non-contact, ironless linear motors. 

Travel270 - 290 mm
Accuracy10 μm TIR
Repeatability< ± 1 μm
Payload50 kg
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