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Z Stage – ZE™

Dover Motion’s ZE™ stage provides a very compact, accurate means of achieving vertical motion. This vertical lift stage provides the very straight, smooth, and repeatable motion needed to satisfy demanding wafer inspection, scanning, and probing applications.

Z STAGE - ZE

Description of this Z Stage

In the Dover ZE™ stage, precision, non-recirculating ways in each of the four corners keep pitch and yaw below 15 arc-seconds over full travel. Both 0.5-inch and 1-inch travel versions are available with collapsed heights to minimize the size of the stage. The 8-inch square mount plate allows the load to be placed in line with the lift force, and eliminates the need to cantilever the payload.

This z stage incorporates a NEMA 23-frame motor (either stepper or servo) coupled to a lead screw which drives a cam-follower along a wedge. This design provides high resolution while our anti-backlash friction nut ensures excellent repeatability. Each stage includes precision Hall effect limit switches which terminate on convenient, locking D sub-mini connectors. The pitch of the lead screw, the ratio of the wedge mechanism, the motor, and the controller together determine the resolution in our ZE™ stage.

Applications for This Z Axis Stage

This translations stage is popular for wafer inspection, scanning, and probing applications.

Design Features

  • Low profile with no cantilevering
  • Excellent straightness and repeatability
  • Anti-backlash friction nut

Specifications

Base ModelZE-05ZE-10ZE-15
Travel (mm)12.52537
Travel (in)0.511.5
Accuracy (μm TIR)7.51523
Bi-directional Repeatability (± μm)1.51.51.5
Load Capacity (kg)12.512.512.5
Flatness & Straightness (μm TIR)51015
Total Mass (kg)7.49.113.1

Options

  • Motor options available: stepper or servo
  • Feedback options available: rotary encoder
  • Download the datasheet for additional technical details about this motorized z axis stage
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