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Linear Stages: Semiconductor

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Below is a selection of direct drive and linear motor products for semiconductor applications. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.

Servo Linear Motor Actuator - MAG

MAG™

The MAG™ series servo linear actuator utilizes a moving magnet design and linear servo motor.  

Travel50 - 250 mm
Accuracy3 μm TIR
Repeatability< ± 0.5 μm
Payload75 kg
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Air Bearing Linear Stage – AIRGLIDE

AG™

The Airglide™ air bearing stage design uses precision stiff air bearings for large payloads. 

Travel150 - 400 mm
Accuracy4 μm TIR
Repeatability< ± 0.4 μm
Payload40 kg
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Low Profile Linear Bearing Stage – FIBERBEAM

FB™

FiberBeam™ linear air bearing positioners are designed for high accuracy in a low profile.  

Travel20 - 100 mm
Accuracy2 μm TIR
Repeatability< ± 0.1 μm
Payload15 kg
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XY POSITIONING STAGE – XYR

XYR™

The XYR™ series XY positioning stage is our most popular XY linear stage and uses a lead screw for motion. The monolithic integrated XY center makes the stage stiff and compact.

Travel50 - 300 mm
Accuracy15 μm
Repeatability< ± 3 μm
Payload175 kg
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PRECISION XY TABLE – XYRB

XYRB™

The XYRB™ series precision XY stage is similar to the XYR™, but incorporates a ball screw for more precise and repeatable positioning. The encoder option improves accuracy.

Travel50 - 300 mm
Accuracy8 μm TIR
Repeatability< ± 1 μm
Payload175 kg
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Z STAGE – ZE

ZE™

Our elevator wedge Z stage provides a small footprint with a 200-millimeter-square moving table.

Travel12 - 38 mm
Accuracy15 μm TIR
Repeatability< ± 1.5 μm
Payload10 kg
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BALL SCREW LINEAR ACTUATOR – LMB

LMB™

The LMB™ series ball screw linear actuator is a high-precision, single-axis stage with crossed roller bearings.

Travel50 - 300 mm
Accuracy8 μm TIR
Repeatability< ± 0.5 μm
Payload175 kg
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XYZ Overhead – SAX

SAX

The Dover SAX gantry stage is a versatile split-axis XY gantry system utilizing high-efficiency, non-contact, ironless linear motors. 

Travel270 - 290 mm
Accuracy10 μm TIR
Repeatability< ± 1 μm
Payload50 kg
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