Stiff Crossed Roller Bearings for Superior Performance

The XYR™ stepper motor stage is a low-profile XY platform designed for precision positioning and is one of Dover Motion’s most versatile and popular offerings. It is designed using stiff crossed roller bearings for superior performance.

Specifications

Stepper Motor Stage – XYR™ Specifications


wdt_ID Base Model XYR-4040 XYR-6060 XYR-8080 XYR-1010 XYR-1212 XYR-1414
1 Travel (mm) 50x50 100x100 150x150 200x200 250x250 300x300
2 Travel (in) 2x2 4x4 6x6 8x8 10x10 12x12
3 Accuracy (μm TIR) Commercial Grade 45 65 75 80 100 120
4 Bi-directional Repeatability (± μm) Commercial Grade 6 6 6 6 6 6
5 Accuracy (μm TIR) Precision Grade 15 20 25 30 35 40
6 Bi-directional Repeatability (± μm) Precision Grade 3 3 3 3 3 3
7 Load Capacity (kg) 75 95 125 145 175 175
8 Flatness & Straightness (μm TIR) 5 6 8 10 12 14
9 Total Mass (kg) 3.9 7.3 10.9 16.6 23.6 76

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Description

The Dover Motion XYR™ stepper motor stage features a specialized monolithic center that couples the upper and lower axes, making the stage stiff and compact and machining in orthogonality between the axes. Both motors are mounted to the center section and move with the lower axis only. Motors, knobs, couplings, Hall effect end of travel limits, and screw locking connectors are included.

There are two grades of lead screws available, commercial and precision, depending on the requirements of the application, and linear or rotary encoder feedback can be added for increased positioning accuracy. For applications where a ball screw positioning stage is preferred, see Dover Motion’s XYRB series.

Design Features

  • Low-profile XY
  • Precision crossed roller XY stage bearings provide high stiffness
  • Machined-in precision

Options

  • Motor options available for the XYR stage: stepper or servo motors
  • Feedback options available: rotary encoder or linear encoder with analog or digital (1 um or 0.1 um resolution are standard, other resolutions available upon request)
  • Download the datasheet for additional technical details about this precision XYR stage

Applications

Applications for XYR stepper motor stage include semiconductor wafer placement, factory automation, medical sample motion, microelectronics assembly, inspection, and laser machining.

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Datasheets

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