The Ultimate in Performance, Reliability, and Value
The Dover Airglideā¢ air bearing stage combines the ultimate in performance, reliability, and value. The stage design uses ultra-precision air bearings providing extremely smooth motion, clean operation, and reliability.
Specifications
Airglideā¢ Air Bearing Stage Specifications
| wdt_ID | Base Model | AG-150 | AG-200 | AG-250 | AG-300 | AG-350 | AG-400 |
|---|---|---|---|---|---|---|---|
| 1 | Travel (mm) | 150 | 200 | 250 | 300 | 350 | 400 |
| 2 | Travel (in) | 5 | 7 | 9 | 11 | 13 | 15 |
| 3 | Accuracy (Ī¼m TIR) | 4 | 4 | 4 | 5 | 6 | 6 |
| 4 | Bi-directional Repeatability (Ā± Ī¼m) | 0.4 | 0.4 | 0.4 | 0.4 | 0.4 | 0.4 |
| 5 | Load Capacity (kg) | 40 | 40 | 40 | 40 | 40 | 40 |
| 6 | Maximum Acceleration (m/sĀ²) | 5 | 5 | 5 | 5 | 5 | 5 |
| 7 | Maximum Velocity (m/s) | 1 | 1 | 1 | 1 | 1 | 1 |
| 8 | Flatness & Straightness (Ī¼m TIR) | 1.5 | 1.5 | 1.5 | 1.5 | 2 | 2 |
| 9 | Motor Peak Force (N) | 240 | 240 | 240 | 240 | 240 | 240 |
| 10 | Motor Continuous Force (N) | 76 | 76 | 76 | 76 | 76 | 76 |
Description
The Airglideā¢ has a brushless linear servo motor that allows for high speeds with no maintenance, making it ideal for use in high throughput applications. ThisĀ air bearingĀ stage can be setup as an individual axis with travel from 100 millimeters up to 400 millimeters, or stacked as an XY assembly. Additional vacuum and signal lines can also be made available on the stationary base plate and routed to the top plate.
The Airglideā¢ also includes high flex cabling with standard termination points for single and XY configurations. This cabling system can greatly simplify external wiring for convenient integration.
A linear encoder is standard and available in several resolutions and accuracy grades. Dover Motion offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.
Design Features
Precision machined components offer:
- <1 Āµm accuracy (with 2 pt. comp)
- Velocity stability < 0.5% while scanning
- Industry leading straightness (Ā± 0.5 Āµm)
- Air bearings stage design provides maintenance free operation
Options
- Motor options available: ironless linear 3 phase servo motors
- Feedback options available: linear encoder with analog or digital (1 Āµm or 0.1 Āµm resolution are standard, other resolutions available upon request)
Applications
The AirGlideā¢ performance is ideal for high precision laser machining applications which require smooth scanning motion for arc and circle coordinated motion or raster scans due to the Dover air bearings.
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