Airglide™ Air Bearing Stage
The Dover Airglide™ air bearing stage combines the ultimate in performance, reliability, and value. The stage design uses ultra-precision air bearings providing extremely smooth motion, clean operation, and reliability.
The Airglide™ has a brushless linear servo motor that allows for high speeds with no maintenance, making it ideal for use in high throughput applications. This air bearing stage can be setup as an individual axis with travel from 100 millimeters up to 400 millimeters, or stacked as an XY assembly. Additional vacuum and signal lines can also be made available on the stationary base plate and routed to the top plate.
The Airglide™ also includes high flex cabling with standard termination points for single and XY configurations. This cabling system can greatly simplify external wiring for convenient integration.
A linear encoder is standard and available in several resolutions and accuracy grades. Dover Motion offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.
The AirGlide™ performance is ideal for high precision laser machining applications which require smooth scanning motion for arc and circle coordinated motion or raster scans due to the Dover air bearings.
Precision machined components offer:
- <1 µm accuracy (with 2 pt. comp)
- Velocity stability < 0.5% while scanning
- Industry leading straightness (± 0.5 µm)
- Air bearings stage design provides maintenance free operation
|Accuracy (μm TIR)||4||4||4||5||6||6|
|Bi-directional Repeatability (± μm)||0.4||0.4||0.4||0.4||0.4||0.4|
|Load Capacity (kg)||40||40||40||40||40||40|
|Maximum Acceleration (m/s²)||5||5||5||5||5||5|
|Maximum Velocity (m/s)||1||1||1||1||1||1|
|Flatness & Straightness (μm TIR)||1.5||1.5||1.5||1.5||2||2|
|Motor Peak Force (N)||240||240||240||240||240||240|
|Motor Continuous Force (N)||76||76||76||76||76||76|
- Motor options available: ironless linear 3 phase servo motors
- Feedback options available: linear encoder with analog or digital (1 µm or 0.1 µm resolution are standard, other resolutions available upon request)