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Home » Motion Solutions » Linear Stages » Microscope Stages » Microscope Stage – XYMR™ Open Frame

Microscope Stage – XYMR™ Open Frame

The XYMR™ microscope stage brings automated, highly accurate XY positioning to a wide range of microscope based applications. It offers exceptional flatness, straightness, and linear positioning accuracy.

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MICROSCOPE STAGE – XYMR

Description

This microscope stage provides exceptional flatness, straightness, and linear positioning accuracy by utilizing crossed roller ways and precision ground lead screws with anti-backlash nuts. It features the three-piece construction found in the Dover XYR™ series that machines orthogonality into the center section and provides and extremely low profile.

Due to the XYMR™ stage body being only 1.2 inches with a large 3-inch clear aperture, it can be used with closely spaced and high-numerical aperture objectives and condensers. It is also available with a solid top. Screw locking d-subminiature 15 connectors for both axes are mounted to the same section to simplify cabling. Note that since both motors are mounted to the center section, they both move in one direction with the lower axis.

Applications

XYMR microscope stage applications include wafer, mask, and die inspection, cell counting and analysis, and video profilometry.

Design Features

  • 3-inch diameter clear aperture for transmissive applications
  • Super-thin cross section
  • Precision crossed-roller ways

Specifications

Base ModelXYMR-8080
Travel (mm)150 x 150
Travel (inches)6 x 6
Accuracy (μm TIR)30
Bi-directional Repeatability (± μm)1.5
Load Capacity (kg)10
Flatness & Straightness (μm TIR)10
Total Mass (kg)5

Options

  • Motor options available: stepper motor
  • Feedback options available: rotary encoder
  • Download the datasheet for additional technical details

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