Wafer Inspection, Scanning, and Probing Applications
Dover Motion’s ZE™ precision vertical stage provides a very compact, accurate means of achieving vertical motion. This vertical lift stage provides the very straight, smooth, and repeatable motion needed to satisfy demanding wafer inspection, scanning, and probing applications.
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Specifications
Precision Vertical Stage – ZE™ Specifications
| wdt_ID | Base Model | ZE-05 | ZE-10 | ZE-15 |
|---|---|---|---|---|
| 1 | Travel (mm) | 12.5 | 25 | 37 |
| 2 | Travel (in) | 0.5 | 1 | 1.5 |
| 3 | Accuracy (μm TIR) | 7.5 | 15 | 23 |
| 4 | Bi-directional Repeatability (± μm) | 1.5 | 1.5 | 1.5 |
| 5 | Load Capacity (kg) | 12.5 | 12.5 | 12.5 |
| 6 | Flatness & Straightness (μm TIR) | 5 | 10 | 15 |
| 7 | Total Mass (kg) | 7.4 | 9.1 | 13.1 |
Description
In the Dover ZE™ stage, precision, non-recirculating ways in each of the four corners keep pitch and yaw below 15 arc-seconds over full travel. Both 0.5-inch and 1-inch travel versions are available with collapsed heights to minimize the size of the stage. The 8-inch square mount plate allows the load to be placed in line with the lift force, and eliminates the need to cantilever the payload.
This stage incorporates a NEMA 23-frame motor (either stepper or servo) coupled to a lead screw which drives a cam-follower along a wedge. This design provides high resolution while our anti-backlash friction nut ensures excellent repeatability. Each stage includes precision Hall effect limit switches which terminate on convenient, locking D sub-mini connectors. The pitch of the lead screw, the ratio of the wedge mechanism, the motor, and the controller together determine the resolution in our ZE™ stage.
Design Features
- Low profile with no cantilevering
- Excellent straightness and repeatability
- Anti-backlash friction nut
Options
- Motor options available: stepper or servo
- Feedback options available: rotary encoder
- Download the datasheet for additional technical details about this motorized z axis stage
- View all of Dover Motion’s Z stages
Applications
This translations stage is popular for wafer inspection, scanning, and probing applications.
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Datasheets