SmartStage™ XY Positioning Stage

Dependability:

• Reliability and confidence of an experienced supplier.
• More than 22,000 motion systems shipped to Fortune 500 companies worldwide.
• On-time delivery of over 95%.

Integrated Solution:

• By including the encoder, interpolator, drive, and motion controller electronics all within the stage, the SmartStage positioner is able to achieve high in-position stability and avoid noise errors introduced by external cabling, poor grounding, and other detrimental influences on the feedback signal.
• Ecosystem of SmartStage XY and DOF-5 objective focusing stage provides an integrated control solution for your applications.
• Simplify software architecture with common API between X,Y, and Z stages.

Precision Linear Motor:

• The novel magnetic topology of Dover Motion’s ironless linear motor technology is optimized for high servo bandwidth and uniform force over the entire stroke, and it has no backlash as commonly experienced with screw-based positioners. This allows the SmartStage XY axes to perform equally well for applications requiring high-throughput step and settle or constant velocity scanning.

Step-settle test results: 20 (10 in each direction) moves of 400um settling to +/-25 nm within 36ms
The test was performed 3 times starting at 0mm, 25mm, and 45mm on the upper axis of an SS-XY-50×50 w/ 1.25nm resolution encoder and a 200g payload.

Optional SmartStage XY Ultra Resolution Encoder:

• Provides ultra low encoder sub-divisional error resulting in +/- 5nm position accuracy per 100 um of travel.  This is especially useful when used with Trigger On Position for accurate camera or laser triggers while scanning.

All while providing high performance

• A potent combination of crossed roller bearing ways and Dover Motion’s linear motor drive system results in superior instrument performance.
• Stiff, crossed roller bearings allow for a wide range of payloads. These bearings also offer exceptional trajectory performance and excel for applications such as constant velocity scanning that requires smooth motion.
• Smooth and Stable Motion: The unique motor design combined with ultra-precision encoder provides consistent force over the entire travel of the stage resulting in extremely low velocity ripple while scanning and < 30nm stability at rest.
• High Resolution Trigger On Position for Image Capture or Laser Synchronization: High speed hardware output with < 1 nm resolution for synchronizing stage position with a camera or laser. Ideal for triggering during motion commonly required for TDI Imaging or laser processing.

Table 1: The SmartStage XY is smaller, lighter, and has fewer cables