Precision Motion Stages for Semiconductor Applications
Solving Critical Motion Challenges in Semiconductor Manufacturing
Precision linear and stepper motor, XY, Z, rotary, mechanical bearing, and air bearing stages are essential for semiconductor manufacturing, delivering the accuracy, stability, and throughput required to meet the demands of advanced process tools and equipment. We specialize in building compact, customizable motion solutions that simplify system integration, enhance accuracy, and accelerate time to market—empowering engineers to build faster, high-performance solutions for the semiconductor industry.
From Standard to Custom
From sub-nanometer positioning to compact designs, our standard and custom motion solutions are built to support critical semiconductor processes with precision and flexibility:
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Nanometer-level positioning, enabling precise alignment and inspection
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High speed, low settling time motion optimized for quick and stable positioning
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Compact, integration-ready designs to simplify your system architecture
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Scalable motion architectures, available in single-axis, dual-axis, and multi-axis configurations—including tip tilt options.
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Recommended Products:
SmartStageâ„¢ XY Monolithic Stage
The SmartStage XY Monolithic stage, is a linear motor stage in a low-profile XY form factor, with physically integrated controller, designed for precision positioning.
| wdt_ID | Travel | 50 - 75 mm |
|---|---|---|
| 1 | Accuracy | 12 μm |
| 2 | Repeatability | 0.8 μm |
| 3 | Payload (kg) | 10 kg |
XYAâ„¢ Linear Stage
The Dover XYAâ„¢ series XY linear stage incorporates the motor and controller into the body of the stage. Covers provide pinch point protection during motion.
| wdt_ID | Travel | 100 - 200 mm |
|---|---|---|
| 1 | Accuracy | 50 μm TIR |
| 2 | Repeatability | 5 μm |
| 3 | Payload | 10 kg |
SmartStageâ„¢ Shuttle Long Travel Stage
The SmartStage Shuttle is a long travel linear stage, which provides linear motor precision and throughput for XY stage applications.
| wdt_ID | Travel | 200 - 500 mm |
|---|---|---|
| 1 | Accuracy | 5 μm |
| 2 | Repeatability | 1.2 μm |
| 3 | Payload | 10 kg |
AGâ„¢
The Airglide™ air bearing stage design uses precision stiff air bearings for large payloads.
| wdt_ID | Travel | 150 - 400 mm |
|---|---|---|
| 1 | Accuracy | 4 μm TIR |
| 2 | Repeatability | < ± 0.4 μm |
| 3 | Payload | 40 kg |
FBâ„¢
FiberBeam™ linear air bearing positioners are designed for high accuracy in a low profile.
| wdt_ID | Travel | 20 - 100 mm |
|---|---|---|
| 1 | Accuracy | 2 μm TIR |
| 2 | Repeatability | < ± 0.1 μm |
| 3 | Payload | 15 kg |
Why Choose Dover Motion?
Unmatched precision and high throughput: Achieve demand-level positioning accuracy with fast velocity and settling performance with our custom and standard stages.
Robust & Reliable: Built for continuous operation in challenging industrial environments, our stages ensure long-term stability and minimal downtime.
Advanced Control Capabilities: Leveraging our Motion Synergyâ„¢ API and sophisticated control algorithms, we enable precise motion profiles, high-speed triggering, and advanced synchronization.
Deep Industry Experience: We have decades of experience designing motion systems for semiconductor applications.
Scalable Development Cycle Support: From prototype stages to full-production systems, our stages support efficient system scaling.
Integrated Solutions: From individual stages to complete multi-axis systems, we provide comprehensive motion solutions, simplifying integration and accelerating time to market.
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