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High-Precision XY Table – XYRB™

The XYRB™ series precision XY table is a low-profile stage designed for a wide range of applications. This stage is Dover Motion’s highest precision XY stage option for applications that prefer low-cost stepper motors.

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PRECISION XY STAGE– XYRB

Description

The XYRB™ series uses stiff crossed roller mechanical ways for support and smooth motion. Precision ground preloaded ball screws allow higher speeds and better accuracy compared to lead screw driven motion products. A specialized monolithic center couples the upper and lower axes of the ball screw stage making the stage stiff and compact. Both motors are mounted to the center section, and move with the lower axis. Servo motors and linear encoders can be added for more precise positioning and accurate feedback for the highest repeatability and accuracy.

Applications for an XY Table

A customer is utilizing the XYRB™ precision XY table for precise positioning of a semiconductor wafer as part of their probing system. Compared to their previous stacked lead screw stage architecture, the monolithic design and ball screw provide more accurate and repeatable positioning within a smaller height package.

Design Features

  • High speed ball screws
  • Very repeatable motion
  • Best performance value

Specifications for the XYRB™ Motion Table

Base ModelXYRB-4040XYRB-6060XYRB-8080XYRB-1010XYRB-1212XYRB-1414
Travel (mm)50x50100x100150x150200x200250x250300x300
Travel (in)2x24x46x68x810x1012x12
Accuracy (μm TIR) Linear Encoders81015202530
Accuracy (μm TIR) Open Loop131520253035
Bi-directional Repeatability (± μm)111111
Load Capacity (kg)7595125145175175
Flatness & Straightness (μm TIR)579111520
Total Mass (kg)3.97.310.916.623.6

XYRB™ Table CAD Models

Options and Customization for this XY Table

  • Motor options available: stepper or servo motors
  • Feedback options available: rotary encoder or linear encoder with analog or digital (1 micrometer or 0.1 micrometer resolution are standard, other resolutions available upon request)
  • Download the datasheet for additional technical details

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