Linear Motor Stage – XYR™
The XYR™ linear motor stage is a low-profile XY platform designed for precision positioning and is one of Dover Motion’s most versatile and popular offerings. It is designed using stiff crossed roller bearings for superior performance.
Product Details
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Description of the XYR™ Linear Motor Stage
The Dover Motion XYR™ linear motor stage features a specialized monolithic center that couples the upper and lower axes, making the stage stiff and compact and machining in orthogonality between the axes. Both motors are mounted to the center section and move with the lower axis only. Motors, knobs, couplings, Hall effect end of travel limits, and screw locking connectors are included.
There are two grades of lead screws available, commercial and precision, depending on the requirements of the application, and linear or rotary encoder feedback can be added for increased positioning accuracy. For applications where a ball screw positioning stage is preferred, see Dover Motion’s XYRB series.
Applications
Applications for this linear motor stage include semiconductor wafer placement, factory automation, medical sample motion, microelectronics assembly, inspection, and laser machining.
Design Features of the XYR Linear Motor Stage
- Low-profile XY
- Precision crossed roller XY stage bearings provide high stiffness
- Machined-in precision
Specifications
| Base Model | XYR-4040 | XYR-6060 | XYR-8080 | XYR-1010 | XYR-1212 | XYR-1414 |
|---|---|---|---|---|---|---|
| Travel (mm) | 50x50 | 100x100 | 150x150 | 200x200 | 250x250 | 300x300 |
| Travel (in) | 2x2 | 4x4 | 6x6 | 8x8 | 10x10 | 12x12 |
| Accuracy (μm TIR) Commercial Grade | 45 | 65 | 75 | 80 | 100 | 120 |
| Bi-directional Repeatability (± μm) Commercial Grade | 6 | 6 | 6 | 6 | 6 | 6 |
| Accuracy (μm TIR) Precision Grade | 15 | 20 | 25 | 30 | 35 | 40 |
| Bi-directional Repeatability (± μm) Precision Grade | 3 | 3 | 3 | 3 | 3 | 3 |
| Load Capacity (kg) | 75 | 95 | 125 | 145 | 175 | 175 |
| Flatness & Straightness (μm TIR) | 5 | 6 | 8 | 10 | 12 | 14 |
| Total Mass (kg) | 3.9 | 7.3 | 10.9 | 16.6 | 23.6 | 76 |
CAD Model
Options
- Motor options available for the XYR linear motor stage: stepper or servo motors
- Feedback options available: rotary encoder or linear encoder with analog or digital (1 um or 0.1 um resolution are standard, other resolutions available upon request)
- Download the datasheet for additional technical details about this precision XY linear motor stage