Linear Stages: <10 μm Accuracy

Below is a selection of direct drive and linear motor products with an accuracy less than 10 micrometers. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.

The SmartStage direct drive linear motor stage offers high performance and includes an innovative built-in controller right inside the stage.

wdt_ID Travel 50 - 200 mm
1 Accuracy ≤ 10 μm
2 Repeatability 0.8 μm
3 Payload 10 kg

The SmartStage single axis direct drive linear motor stage offers is our single axis linear stage with a built-in controller. It is available in a range of travel sizes and options to meet your precision motion needs.

wdt_ID Travel 50 - 200 mm
1 Accuracy ≤ 10 μm
2 Repeatability 0.8 μm
3 Payload 10 kg

The SmartStage™ Open Frame XY is the first open aperture linear motor stage with an embedded controller physically integrated inside the stage. It is designed for regular or inverted microscopy applications and optimized for well plates and multiple slide holders.

wdt_ID Travel 115 x 75 mm
1 Accuracy ≤ 10 μm
2 Repeatability 0.8 μm
3 Payload 10 kg

The DOF series Dover Objective Focuser stage has been optimized for optical microscopy applications.

wdt_ID Travel 5 mm
1 Resolution 1.25 nm
2 Repeatability < 50 nm
3 Bandwidth > 225 Hz

The SmartStage Z-50 provides a unique combination of travel distance, and precision, for vertical Z stage applications.

wdt_ID Travel 50 mm
1 Resolution 5 nm
2 Accuracy 10 μm
3 Repeatability .8 μm

The MMX-Z-25 is our compact linear stage that delivers exceptional mechanical stiffness and servo bandwidth, making it the perfect fit for high throughput imaging applications.

wdt_ID Travel 25 mm
1 Accuracy 6 μm TIR
2 Repeatability ± 0.4 μm
3 Payload w/magnetic CB 1.5 kg

The MMX™ series miniature direct drive linear motor stage has a low profile design with high power linear servo motor options.

wdt_ID Travel 25 - 150 mm
1 Accuracy < ± 3 μm
2 Repeatability < ± 0.4 μm
3 Payload 10 kg

The MAG™ series servo linear actuator utilizes a moving magnet design and linear servo motor.

wdt_ID Travel 50 - 250 mm
1 Accuracy 3 μm TIR
2 Repeatability < ± 0.5 μm
3 Payload 75 kg

The Airglide™ air bearing stage design uses precision stiff air bearings for large payloads.

wdt_ID Travel 150 - 400 mm
1 Accuracy 4 μm TIR
2 Repeatability < ± 0.4 μm
3 Payload 40 kg

FiberBeam™ linear air bearing positioners are designed for high accuracy in a low profile.

wdt_ID Travel 20 - 100 mm
1 Accuracy 2 μm TIR
2 Repeatability < ± 0.1 μm
3 Payload 15 kg

The XYRB™ series precision XY stage is similar to the XYR™, but incorporates a ball screw for more precise and repeatable positioning. The encoder option improves accuracy.

wdt_ID Travel 50 - 300 mm
1 Accuracy 8 μm TIR
2 Repeatability < ± 1 μm
3 Payload 175 kg

The FM™ series is a ball screw linear stage with a stiffer table and larger crossed roller bearings.

wdt_ID Travel 100 - 350 mm
1 Accuracy 5 μm TIR
2 Repeatability < ± 1.5 μm
3 Payload 115 kg

The LMB™ series ball screw linear actuator is a high-precision, single-axis stage with crossed roller bearings.

wdt_ID Travel 50 - 300 mm
1 Accuracy 8 μm TIR
2 Repeatability < ± 0.5 μm
3 Payload 175 kg