Linear Stages: >10 μm Accuracy

Below is a selection of direct drive and linear motor products with an accuracy more than 10 micrometers. Each can be modified and configured to meet your specific needs. Contact us if you don’t see exactly what you are looking for. We can help you identify the right motion solution for your application.

The SmartStage direct drive linear motor stage offers high performance and includes an innovative built-in controller right inside the stage.

wdt_ID Travel 50 - 200 mm
1 Accuracy ≤ 10 μm
2 Repeatability 0.5 μm
3 Payload up to 6 kg

The MMS™ – Miniature Long Travel Linear Stage ideal for imaging applications where a long travel load/unload axis is required.

wdt_ID Travel 200 - 400 mm
1 Accuracy < 15 μm
2 Repeatability 2 μm
3 Payload 12 kg

The XYR™ series XY positioning stage is our most popular XY linear stage and uses a lead screw for motion. The monolithic integrated XY center makes the stage stiff and compact.

wdt_ID Travel 50 - 300 mm
1 Accuracy 15 μm
2 Repeatability < ± 3 μm
3 Payload 175 kg

The XYA™ series XY linear stage has the motors and controller embedded within the stage structure for a cleaner appearance and less external cabling.

wdt_ID Travel 100 - 200 mm
1 Accuracy 50 μm TIR
2 Repeatability < ± 5 μm
3 Payload 10 kg

The XYL™ series has the largest table size, longer travels, and larger bearings for a stiffer platform that can handle larger payloads.

wdt_ID Travel 300 - 685 mm
1 Accuracy 35 μm TIR
2 Repeatability < ± 3 μm
3 Payload 175 kg

The OFS™ series inverted microscope XY stage of open frame XY tables combines low-profile, two-axis positioning with an open aperture.

wdt_ID Travel 50 - 200 mm
1 Accuracy 15 μm TIR
2 Repeatability < ± 2.5 μm
3 Payload 2 kg

The OFL™ series motorized XY stage provides increased travel and load bearing capacity in an open frame XY configuration.

wdt_ID Travel 200 - 635 mm
1 Accuracy 80 μm TIR
2 Repeatability < ± 3 μm
3 Payload 80 kg

The XYMR™ series microscope stage brings automated, highly accurate XY positioning to a wide range of microscope-based applications.

wdt_ID Travel 150 mm
1 Accuracy 30 μm TIR
2 Repeatability < ± 1.5 μm
3 Payload 10 kg

The KV™ micro linear stage is a lead-screw-driven step motor stage with a miniature size.

wdt_ID Travel 25 - 200 mm
1 Accuracy 15 μm TIR
2 Repeatability < ± 3 μm
3 Payload 15 kg

Our elevator wedge ZE stage provides a small footprint with a 200-millimeter-square moving table.

wdt_ID Travel 12 - 38 mm
1 Accuracy 15 μm TIR
2 Repeatability < ± 1.5 μm
3 Payload 10 kg

The LM™ series linear motion slide is a low-cost, single axis stage with crossed roller ways and stepper motor.

wdt_ID Travel 50 - 300 mm
1 Accuracy 15 μm TIR
2 Repeatability < ± 1.5 μm
3 Payload 175 kg